ELAS System
Cassette to Cassette operation for 4", 6" and 8" wafers. Using industry standard Brooks robot system.
Features
- ESC Large Area Sputter
- Dual level load lock
- CTI 10" cryo pump on chamber as standard
- CTI 8" cryo, turbo pump or rotary pump available on load lock
- 3 Target plus RF etch station as standard
- Through wall mounting for very small cleanroom footprint
- Large area substrate
- Up to 400mm X 420mm
- 4 200mm WAFERS
- 6 150mm WAFERS