Ultra High Purity Materials for Sputtering and Evaporation
Metals | Oxides | Borides | Carbides | Fluorides | Nitrides | Silicides |
Selenides/Sulfides/ Tellurides |
Alloys |
Aluminum, Al | Al(2)O(3) | AIF(3) | AIN | Al/Cu/Si | ||||
Antimony, Sb | Sb(2)O(3) | |||||||
Barium, Ba | BaO | BaF(2) | ||||||
Beryllium, Be | BaF(2) | |||||||
Bismuth, Bi | Bi(2)O(3) | Bi(2)Te(3) | ||||||
Boron, B | B(4)C | BN | ||||||
Cadmium, Cd | CdS, CdSe, CdTe | |||||||
Calcium, Ca | CaF(2) | |||||||
Carbon, C | ||||||||
Cerium, Ce | CeO(2) | CeF(3) | ||||||
Chromium, Cr | Cr(2)O(3) | CrB(2) | Cr(3)C(2) | CrS(2) | ||||
Cobalt, Co | Co/Cr/Pt | |||||||
Copper, Cu | CuO | Cu/Ni | ||||||
Erbium, Er | Er(2)O(3) | ErF(3) | ||||||
Gadolinium, Gd | Gd(2)O(3) | GdF(3) | ||||||
Gallium, Ga | ||||||||
Germanium, Ge | ||||||||
Gold, Au | ||||||||
Hafnium, Hf | HfO(2) | |||||||
Indium, In | In(2)O(3) | In/Sn | ||||||
Iridium, Ir | ||||||||
Iron, Fe | ||||||||
Lanthanum, La | La(2)O(3) | LaB(6) | LaF(3) | |||||
Lead, Pb | PbO | PbS | ||||||
Magnesium, Mg | MgO | MgF(2) | ||||||
Manganese, Mn | ||||||||
Molybdenum, Mo | MoO(3) | Mo(2)B(5) | Mo(2)C | MoSi(2) | MoSe(2),MoS(2) | |||
Neodymium, Nd | Nd(2)O(3) | NdF(3) | ||||||
Nickel, Ni | Ni/Fe,Ni/Cr,Ni/V | |||||||
Niobium, Nb | Nb(2)O(5) | NbB(2) | NbC | NbN | NbSi(2) | |||
Osmium, Os | ||||||||
Palladium, Pd | ||||||||
Platinum, Pt | PtSi | |||||||
Praseodymium, Pr | Pr(6)O(11) | PrF(3) | ||||||
Rhenium, Re | ||||||||
Rhodium, Rh | ||||||||
Ruthenium, Ru | ||||||||
Samarium, Sm | Sm(2)O(3) | |||||||
Selenium, Se | ||||||||
Silicon, Si | SiO(2) | SiC | Si(3)N(4) | |||||
Silver, Ag | ||||||||
Tantalum, Ta | Ta(2)O(2) | TaB | TaC | TaN | TaSi(2) | |||
Tellurium, Te | ||||||||
Terbium, Tb | TbF(3) | |||||||
Tin, Sn | SnO | |||||||
Titanium, Ti | TiO(2) | TiB(2) | TiC | TiN | TiS(2) | Ti/Al, Ti/Zr | ||
Tungsten, W | WO(3) | W(2)B | WC | WSi(2) | W/Ti | |||
Vanadium, V | V(2)O(3) | VB(2) | VC | VN | VSi(2) | |||
Ytterbium, Yb | ||||||||
Yttrium, Y | Y(2)O(3) | |||||||
Zinc, Zn | ZnO | ZnS, ZnSe, ZnTe | ||||||
Zirconium, Zr | ZrO(2) | ZrB(2) | ZrC | ZrN | ZrSi(2) |