944 System
Ease of System Maintenance is just one of the 944 features. The system has been designed by service engineers to specifically allow for easy system maintenance.
Many software features added to make system set-up easy. In addition, the 944 can be used with a variety of different substrates and materials.
Features
- Dual level load lock
- CTI 10" cryo pump on chamber as standard
- CTI 8" cryo, turbo pump or rotary pump available on load lock
- RF etch cooling station as standard
- 4 Target Sputtering Ion Beam Milling System
- Fully automated process control
944 Front
944 Back
IBM Option
IBM Option