General Materials List
Ultra High Purity Materials for Sputtering and Evaporation
| Metals | Oxides | Borides | Carbides | Fluorides | Nitrides | Silicides |
Selenides/Sulfides/ Tellurides |
Alloys |
| Aluminum, Al | Al(2)O(3) | AIF(3) | AIN | Al/Cu/Si | ||||
| Antimony, Sb | Sb(2)O(3) | |||||||
| Barium, Ba | BaO | BaF(2) | ||||||
| Beryllium, Be | BaF(2) | |||||||
| Bismuth, Bi | Bi(2)O(3) | Bi(2)Te(3) | ||||||
| Boron, B | B(4)C | BN | ||||||
| Cadmium, Cd | CdS, CdSe, CdTe | |||||||
| Calcium, Ca | CaF(2) | |||||||
| Carbon, C | ||||||||
| Cerium, Ce | CeO(2) | CeF(3) | ||||||
| Chromium, Cr | Cr(2)O(3) | CrB(2) | Cr(3)C(2) | CrS(2) | ||||
| Cobalt, Co | Co/Cr/Pt | |||||||
| Copper, Cu | CuO | Cu/Ni | ||||||
| Erbium, Er | Er(2)O(3) | ErF(3) | ||||||
| Gadolinium, Gd | Gd(2)O(3) | GdF(3) | ||||||
| Gallium, Ga | ||||||||
| Germanium, Ge | ||||||||
| Gold, Au | ||||||||
| Hafnium, Hf | HfO(2) | |||||||
| Indium, In | In(2)O(3) | In/Sn | ||||||
| Iridium, Ir | ||||||||
| Iron, Fe | ||||||||
| Lanthanum, La | La(2)O(3) | LaB(6) | LaF(3) | |||||
| Lead, Pb | PbO | PbS | ||||||
| Magnesium, Mg | MgO | MgF(2) | ||||||
| Manganese, Mn | ||||||||
| Molybdenum, Mo | MoO(3) | Mo(2)B(5) | Mo(2)C | MoSi(2) | MoSe(2),MoS(2) | |||
| Neodymium, Nd | Nd(2)O(3) | NdF(3) | ||||||
| Nickel, Ni | Ni/Fe,Ni/Cr,Ni/V | |||||||
| Niobium, Nb | Nb(2)O(5) | NbB(2) | NbC | NbN | NbSi(2) | |||
| Osmium, Os | ||||||||
| Palladium, Pd | ||||||||
| Platinum, Pt | PtSi | |||||||
| Praseodymium, Pr | Pr(6)O(11) | PrF(3) | ||||||
| Rhenium, Re | ||||||||
| Rhodium, Rh | ||||||||
| Ruthenium, Ru | ||||||||
| Samarium, Sm | Sm(2)O(3) | |||||||
| Selenium, Se | ||||||||
| Silicon, Si | SiO(2) | SiC | Si(3)N(4) | |||||
| Silver, Ag | ||||||||
| Tantalum, Ta | Ta(2)O(2) | TaB | TaC | TaN | TaSi(2) | |||
| Tellurium, Te | ||||||||
| Terbium, Tb | TbF(3) | |||||||
| Tin, Sn | SnO | |||||||
| Titanium, Ti | TiO(2) | TiB(2) | TiC | TiN | TiS(2) | Ti/Al, Ti/Zr | ||
| Tungsten, W | WO(3) | W(2)B | WC | WSi(2) | W/Ti | |||
| Vanadium, V | V(2)O(3) | VB(2) | VC | VN | VSi(2) | |||
| Ytterbium, Yb | ||||||||
| Yttrium, Y | Y(2)O(3) | |||||||
| Zinc, Zn | ZnO | ZnS, ZnSe, ZnTe | ||||||
| Zirconium, Zr | ZrO(2) | ZrB(2) | ZrC | ZrN | ZrSi(2) |